Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier

摘要

A pulse multiplier includes a beam splitter and one or more mirrors. The beam splitter receives a series of input laser pulses and directs part of the energy of each pulse into a ring cavity. After circulating around the ring cavity, part of the pulse energy leaves the ring cavity through the beam splitter and part of the energy is recirculated. By selecting the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitter. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.

主权项

1. A pulse multiplier comprising:
a beam splitter for receiving a laser pulse; and one or more mirrors forming a ring cavity including the beam splitter; wherein the beam splitter directs a first fraction of energy of the laser pulse as an output of the pulse multiplier, and directs a second fraction of the energy of the laser pulse into the ring cavity.