INTEGRATED WAVEFRONT SENSOR AND PROFILOMETER

摘要

An instrument for measuring aspheric optical surfaces includes both an optical wavefront sensor and a single-point optical profilometer. The optical wavefront sensor measures surface height variations throughout one or more areas of an aspheric test surface. The single-point profilometer measures surface height variations along one or more traces on the aspheric test surface. At least one of the traces intersects at least one of the areas, and respective spatial frames of reference for the traces and areas are relatively adapted to each other by minimizing differences between points of nominal coincidence between the areas and traces.

主权项

1. Apparatus for measuring aspheric test surfaces comprising:
an optical wavefront sensor for measuring surface height variations throughout one or more areas of an aspheric test surface within a limited region of the aspheric surface, a single-point profilometer for measuring surface height variations along one or more traces on the aspheric test surface within an extended region of the aspheric surface, the extended region overlapping at least a portion of the limited region and extending beyond the limited region, at least one of the one or more traces overlapping at least one of the one or more areas on the aspheric test surface defining a set of overlapping surface height measurements; and a processor that combines the surface height measurements of the optical wavefront sensor within the limited region with the surface height measurements of the single-point profilometer within the extended region by minimizing differences within the set of overlapping surface height measurements for producing an integrated measurement of the limited and extended regions within a common frame of reference.