发明名称 EPOXY FORMULATIONS AND PROCESSES FOR FABRICATION OF RELIEF PATTERNS ON LOW SURFACE ENERGY SUBSTRATES
摘要 The present invention is directed to a permanent epoxy photoresist composition useful for making negative-tone, permanent photoresist relief patterns on low surface energy polymer substrates, comprising: (A) one or more epoxy resins according to Formulas I-VI, (B) one or more cationic photoinitiators; (C) one or more film casting solvents; and (D) one or more fluorinated compounds. The present invention is also directed to methods of forming a permanent photoresist relief pattern on a low surface energy polymer substrate using the disclosed composition.
申请公布号 KR20140068144(A) 申请公布日期 2014.06.05
申请号 KR20147008830 申请日期 2012.09.05
申请人 MICROCHEM CORP. 发明人 NAWROCKI DANIEL J.;GOLDEN JEREMY V.;WEBER WILLIAM D.
分类号 G03F7/004;C08L63/00 主分类号 G03F7/004
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