| 发明名称 |
METHOD OF WET CLEANING ALUMINUM CHAMBER PARTS |
| 摘要 |
A method of wet cleaning an aluminum part having bare aluminum surfaces and anodized aluminum surfaces. The method includes CO2 dry ice blasting the surfaces of the aluminum part at approximately 35 to approximately 45 psi, masking the aluminum part to conceal the bare aluminum surfaces, soaking the dry ice blasted and masked aluminum part in deionized water at or above approximately 60° C., scrubbing the aluminum part with an abrasive pad and deionized water after completion of the soaking in deionized water, and repeating the soaking and scrubbing in the recited order at least three additional times. |
| 申请公布号 |
US2014150819(A1) |
申请公布日期 |
2014.06.05 |
| 申请号 |
US201314041385 |
申请日期 |
2013.09.30 |
| 申请人 |
Lam Research Corporation |
发明人 |
Shih Hong;Sze Fan-Cheung;McMillin Brian;Daugherty John;Fang Yan;Outka Duane;Huang Tuochuan;Ramanathan Sivakami |
| 分类号 |
H01L21/67 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
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| 主权项 |
1. A method of wet cleaning an aluminum part comprising bare aluminum surfaces and anodized aluminum surfaces, the method comprising:
CO2 dry ice blasting at approximately 35 to approximately 45 psi the surfaces of the aluminum part; masking the aluminum part to conceal the bare aluminum surfaces; soaking the dry ice blasted and masked aluminum part in deionized water at or above approximately 60° C.; scrubbing the aluminum part with an abrasive pad and deionized water after completion of the soaking in deionized water; and repeating the soaking and scrubbing in the recited order at least three additional times.
|
| 地址 |
Fremont CA US |
