发明名称 METHODS OF PROCESSING UNITS COMPRISING CRYSTALLINE MATERIALS, AND METHODS OF FORMING SEMICONDUCTOR-ON-INSULATOR CONSTRUCTIONS
摘要 Some embodiments include methods of processing a unit containing crystalline material. A damage region may be formed within the crystalline material, and a portion of the unit may be above the damage region. A chuck may be used to bend the unit and thereby induce cleavage along the damage region to form a structure from the portion of the unit above the damage region. Some embodiments include methods of forming semiconductor-on-insulator constructions. A unit may be formed to have dielectric material over monocrystalline semiconductor material. A damage region may be formed within the monocrystalline semiconductor material, and a portion of the monocrystalline semiconductor material may be between the damage region and the dielectric material. The unit may be incorporated into an assembly with a handle component, and a chuck may be used to contort the assembly and thereby induce cleavage along the damage region.
申请公布号 KR20140068147(A) 申请公布日期 2014.06.05
申请号 KR20147008912 申请日期 2012.09.07
申请人 MICRON TECHNOLOGY, INC. 发明人 QIN SHU;ZHANG MING
分类号 H01L27/12;H01L21/20 主分类号 H01L27/12
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