发明名称 OSCILLATOR, METHOD FOR MANUFACTURING OSCILLATOR, ELECTRONIC APPARATUS, AND MOVABLE BODY
摘要 PROBLEM TO BE SOLVED: To provide an oscillator where sticking of an oscillating part as a movable electrode is suppressed.SOLUTION: An oscillator comprises; an oscillating part; a support part extended from the oscillating part. The support part comprises a part having different thickness at a cross section viewed from a direction where the support part is extended.
申请公布号 JP2014103434(A) 申请公布日期 2014.06.05
申请号 JP20120252006 申请日期 2012.11.16
申请人 SEIKO EPSON CORP 发明人 INABA SHOGO
分类号 H03H9/24;H03H3/007 主分类号 H03H9/24
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