OSCILLATOR, METHOD FOR MANUFACTURING OSCILLATOR, ELECTRONIC APPARATUS, AND MOVABLE BODY
摘要
PROBLEM TO BE SOLVED: To provide an oscillator where sticking of an oscillating part as a movable electrode is suppressed.SOLUTION: An oscillator comprises; an oscillating part; a support part extended from the oscillating part. The support part comprises a part having different thickness at a cross section viewed from a direction where the support part is extended.