| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card case capable of easily handling a probe card, and coping with even a diameter-reduced (miniaturized) probe card.SOLUTION: A probe card case for storing a probe card includes: a first case member in which the probe card can be placed at a predetermined position; a second case member 200 configured so as to be fit into the upper side of the first case member, and provided with a card fixing mechanism 204 for fixing the probe card; and a case fixing mechanism 206 for fixing the first case member to the second case member 200. The probe card case is configured such that the probe card is internally stored, and conveyed in a state that the first case member and the second case member 200 are fixed, and that the probe card is conveyed with only the second case member 200 in a state that the probe card is fixed to the second case member 200. |
