发明名称 |
SINGLE CRYSTAL MANUFACTURING APPARATUS AND SINGLE CRYSTAL MANUFACTURING METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal manufacturing apparatus capable of independently controlling a temperature distribution around a growth surface and a temperature distribution of a raw material part, and a method for manufacturing the single crystal using the single crystal manufacturing apparatus.SOLUTION: A single crystal manufacturing apparatus 10a comprises: a crucible 20 for fixing a seed crystal 22 for growing a single crystal in the upper part and charging a raw material 24 for growing the single crystal in the lower part; a first heating part 30 for mainly heating the raw material 24; a perforated heat insulation member 40 arranged around the crucible 20 above the first heating part 30; and distance adjustment means for adjusting a distance between at least a part of the heat insulation member 40 and the first heating part 30. The single crystal can be manufactured by growing a single crystal on the growth surface of the seed crystal 22 while adjusting the distance between at least a part of the heat insulation member 40 and the first heating part 30 during its growth using the single crystal manufacturing apparatus 10a. |
申请公布号 |
JP2014101246(A) |
申请公布日期 |
2014.06.05 |
申请号 |
JP20120253764 |
申请日期 |
2012.11.19 |
申请人 |
TOYOTA CENTRAL R&D LABS INC;DENSO CORP;SHOWA DENKO KK |
发明人 |
GUNJISHIMA TSUKURU;KONDO HIROYUKI;KOBAYASHI MASAKAZU |
分类号 |
C30B23/06;C30B29/36 |
主分类号 |
C30B23/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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