发明名称 SINGLE CRYSTAL MANUFACTURING APPARATUS AND SINGLE CRYSTAL MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a single crystal manufacturing apparatus capable of independently controlling a temperature distribution around a growth surface and a temperature distribution of a raw material part, and a method for manufacturing the single crystal using the single crystal manufacturing apparatus.SOLUTION: A single crystal manufacturing apparatus 10a comprises: a crucible 20 for fixing a seed crystal 22 for growing a single crystal in the upper part and charging a raw material 24 for growing the single crystal in the lower part; a first heating part 30 for mainly heating the raw material 24; a perforated heat insulation member 40 arranged around the crucible 20 above the first heating part 30; and distance adjustment means for adjusting a distance between at least a part of the heat insulation member 40 and the first heating part 30. The single crystal can be manufactured by growing a single crystal on the growth surface of the seed crystal 22 while adjusting the distance between at least a part of the heat insulation member 40 and the first heating part 30 during its growth using the single crystal manufacturing apparatus 10a.
申请公布号 JP2014101246(A) 申请公布日期 2014.06.05
申请号 JP20120253764 申请日期 2012.11.19
申请人 TOYOTA CENTRAL R&D LABS INC;DENSO CORP;SHOWA DENKO KK 发明人 GUNJISHIMA TSUKURU;KONDO HIROYUKI;KOBAYASHI MASAKAZU
分类号 C30B23/06;C30B29/36 主分类号 C30B23/06
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