| 摘要 |
<p>PROBLEM TO BE SOLVED: To shorten a laser processing time of an opening pattern.SOLUTION: In a production method of a vapor deposition mask in which a member for a mask is formed, which is obtained by bringing close to a resin film 4, a magnetic metal member 2 provided with a plurality of through holes 1 having a larger shape dimension than a thin film pattern on a position corresponding to the plurality of thin film patterns to be formed by vapor deposition, and then the film 4 part in each through hole 1 is irradiated with laser light L, and an opening pattern 3 having the same shape dimension as the thin film pattern is laser-processed on a position corresponding to the thin film pattern, laser processing of the opening pattern 3 is performed by irradiating each side of the opening pattern to be formed with striped laser light L having a narrower width than the opening pattern 3.</p> |
