| 摘要 |
PROBLEM TO BE SOLVED: To provide a target supply device capable of preventing dielectric breakdown, or properly outputting a target substrate.SOLUTION: A target supply device may comprise: a tank having a nozzle; a first electrode provided with a first through hole and provided so that a center shaft of the nozzle is positioned in the first through hole; a second electrode comprising a main body on which the second through hole is provided, and a collection part cylindrically formed to extend from a peripheral edge of the second through hole in a direction for approaching to the nozzle, and provided so that the center shaft of the nozzle is positioned in the second through hole; a third electrode provided inside the tank; and a heating part for heating the second electrode. |
