| 摘要 |
PROBLEM TO BE SOLVED: To suppress the corrosion and the like of an extraction electrode, and to suppress influence on vibration characteristics or a rise in a resistance value of an excitation electrode and the like.SOLUTION: A piezoelectric device includes: a piezoelectric vibration piece 130 having a frame portion 132 surrounding a vibrating portion 131, and equipped with extraction electrodes 137 and 138 electrically connected with excitation electrodes 135 and 136 provided on the vibrating portion 131, on the frame portion 132; a rid portion 110 joined to a surface of the piezoelectric vibration piece 130 through a joint material 141; and a base portion 120 joined to a back surface of the piezoelectric vibration piece 130 through a joint material 142, and equipped with an external electrode 124 electrically connected to the extraction electrodes 137 and 138. The excitation electrodes 135 and 136, and the extraction electrodes 137 and 138 have: a base film 201 formed by metal capable of forming a passive state; and a first metallic film 202 and a second metallic film 203 laminated on the base film 201. The base film 201 is set to have a film thickness of 1.0 nm to 8.0 nm. |
