| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a vacuum film forming apparatus which hardly causes wrinkles and the like in a resin film (a long body) without large-scale remodeling and modification of a conventional apparatus.SOLUTION: A vacuum film forming apparatus comprises, in a vacuum chamber: a wind-off roll 114 which winds off a long body 113; a wind-up roll 129 which winds up the long body 113; a cooling can roll 123; and sputtering cathodes 130-133. The vacuum film forming apparatus winds a carried long body on the outer peripheral surface of the cooling can roll 123, and forms a thin film on the long body surface not contacting with the outer peripheral surface of the cooling can roll 123. The vacuum film forming apparatus comprises: a cooling panel 134 which is provided in the vicinity of the surface of the long body carried between the cooling can roll 123 and the wind-up roll 129 and has a refrigerator 135 capable of cooling to 130 K or lower; and cooling gas introduction means which introduces a cooling gas between the surface of the carried long body and the cooling panel 134.</p> |
