发明名称 ETCHING SOLUTION FOR COPPER OR COPPER ALLOY
摘要 <p>PROBLEM TO BE SOLVED: To provide an etching solution with high stability, which foams less at the time of use and which can highly selectively perform the etching of copper or copper alloy, in a process of etching copper or copper alloy from an electronic substrate having a layer comprising a copper or copper alloy and a layer comprising a nickel, and from an electronic substrate having a layer comprising a copper or copper alloy and a layer comprising a tin or tin alloy.SOLUTION: Use an etching solution for a process to selectively etch the layers comprising a copper or copper alloy from an electronic substrate having a layer comprising a copper or copper alloy and a layer comprising a nickel, and from an electronic substrate having a layer comprising a copper or copper alloy and a layer comprising a tin or tin alloy, and use the etching solution for copper or copper alloy comprising alkoxy alkyl amine (A) as essential component.</p>
申请公布号 JP2014101560(A) 申请公布日期 2014.06.05
申请号 JP20120255450 申请日期 2012.11.21
申请人 SANYO CHEM IND LTD 发明人 KOJIMA TSUTOMU
分类号 C23F1/18;H01L21/308 主分类号 C23F1/18
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