发明名称 |
SUCTION APPARATUS, CARRY-IN METHOD, CONVEYANCE SYSTEM, LIGHT EXPOSURE DEVICE, AND DEVICE PRODUCTION METHOD |
摘要 |
In a conveyance system, a chuck unit (153) is used to hold a placed wafer (W) from above, and vertical-motion pins (140) use suction to hold said wafer (W) from below. The chuck unit (153) and the vertical-motion pins (140) are subsequently lowered until a bottom surface of the wafer comes into contact with a wafer table (WTB). During said lowering, the holding force exerted by the chuck unit (153) and the arrangement of chuck members (124) are optimally adjusted such that, as a result of the restraint of the wafer (W) by the chuck unit (153) and the vertical-motion pins (140), localized surplus-restraint is imparted to the wafer (W), and warping does not occur. |
申请公布号 |
WO2014084228(A1) |
申请公布日期 |
2014.06.05 |
申请号 |
WO2013JP81851 |
申请日期 |
2013.11.27 |
申请人 |
NIKON CORPORATION |
发明人 |
ICHINOSE, GO;IBE, TAISUKE |
分类号 |
H01L21/027;G03F7/20;H01L21/677 |
主分类号 |
H01L21/027 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|