| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve decomposition capacity of NFgas and to lower temperature of waste water.SOLUTION: The electric heating type gas detoxifying device for detoxifying exhaust gas includes: an electric heating type heater 11; a reactor 10 for decomposing the gas by heat; a circulated water container 20 that is connected to the inside of the reactor 10 via piping and stores the circulated water 21; a mechanism that supplies the exhaust gas from a semiconductor manufacturing device to a space on the water in the circulated water container 20 and introduces the exhaust gas via piping into the reactor 10; a mechanism that supplies air and gas containing oxygen or inactive gas into the circulated water container 20 and introduces the air and the gas via the piping into the reactor 10; a humidification mechanism 60 that is provided in at least one of the inside of the reactor 10 and between the reactor 10 and the circulated water container 20 and atomises water and adds the atomised water to the gas introduced into the reactor 10; and a mechanism that exhausts the gas decomposed in the reactor 10; and a mechanism that introduces water generated by the decomposition of the gas in the reactor 10 into the circulated water container 20.</p> |
