发明名称 SHAPE MEASUREMENT DEVICE, STRUCTURE MANUFACTURING SYSTEM, SHAPE MEASUREMENT METHOD, STRUCTURE MANUFACTURING METHOD, AND PROGRAM FOR THE SAME
摘要 PROBLEM TO BE SOLVED: To reduce an influence of a noise component included in point group information on having a shape of a measurement object measured.SOLUTION: The shape measurement device according to the present invention comprises: a measurement coordinate generation part that generates a plurality of measurement coordinates indicative of a shape of a measurement object on the basis of information on having the shape of the measurement object measured; and an interpolation coordinate calculation part that, as to at least three measurement coordinates among the plurality of measurement coordinates positioned on an interpolation reference line set on the basis of a scanning direction upon measuring the measurement object by the measurement coordinate generation part, calculates an interpolation coordinate on the basis of a difference between respective positions on the interpolation reference line and an interpolation position serving as a position on the interpolation reference line set for calculating the interpolation coordinate which interpolates the measurement coordinates.
申请公布号 JP2014102243(A) 申请公布日期 2014.06.05
申请号 JP20130051853 申请日期 2013.03.14
申请人 NIKON CORP 发明人 MARUYAMA SHINYA
分类号 G01B11/24;G06T1/00;G06T5/00 主分类号 G01B11/24
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