DISC-BRUSH HOLDER APPARATUS, DISC-BRUSH ASSEMBLY, AND SUBSTRATE PROCESSING METHODS

摘要

In one aspect, a disc-brush pad holder apparatus is disclosed. The disc-brush pad holder apparatus has a first portion adapted to couple to a rotatable adapter, and a pad holding portion having a frontal surface receiving a disc-brush pad, the pad holding portion having a flexible radially-extending disc portion that flexes during cleaning. Disc-brush assemblies and methods of processing substrates are provided, as are numerous other aspects.

主权项

1. A disc-brush holder apparatus, comprising:
a first portion adapted to couple to a rotatable adapter, and a pad holding portion coupled to the first portion and having a frontal surface adapted to receive a disc-brush pad, the pad holding portion having a radially-extending disc portion having a spring rate of less than about 30 lb/in when measured by applying a force of 3 lb at an radially-outermost periphery of the radially-extending disc portion.