SELF-ASSEMBLED STRUCTURE, METHOD OF MANUFACTURING THE SAME AND ARTICLE COMPRISING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a self-assembled structure in a graft block copolymer having an average largest width or thickness of less than 60 nm as well as showing a periodicity of less than 60 nm, and a method for manufacturing the structure, and an article comprising the structure.SOLUTION: A copolymer is disclosed, comprising a backbone polymer and a first graft polymer, in which the first graft polymer comprises a surface energy reducing moiety; the first graft polymer is grafted onto the backbone polymer; and the surface energy reducing moiety comprises a fluorine atom, a silicon atom, or a combination of a fluorine atom and a silicon atom. The backbone polymer is polynorbornene; and the first graft polymer is a poly(fluorostyrene), a poly(tetrafluoro-hydroxy styrene), or a combination of these.