METHOD AND SYSTEM FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

A method for manufacturing a semiconductor device is provided. The method contains steps of providing the semiconductor device including a working area; directing a medium flow onto the working area; configuring a lens in contact with the medium flow; and directing a laser beam to the working area through the lens and the medium flow. A laser processing for manufacturing a semiconductor device is also provided.

主权项

1. A laser processing system for manufacturing a semiconductor device including a working area, comprising:
a laser beam outlet providing therethrough a laser beam to the working area; and a medium providing device including a first passage, a second passage and a bridging part connected therebetween for providing a medium onto the working area via the first passage and collecting the medium from the working area via the second passage to form a medium flow on the working area, wherein the bridging part is connected with the laser beam outlet.