发明名称 |
MASK FRAME ASSEMBLY FOR THIN FILM DEPOSITION |
摘要 |
A mask frame assembly for thin film deposition includes a mask frame having an opening, and a mask configured to be coupled to the mask frame and including a first surface for facing a deposition substrate, a second surface opposite the first surface, and a deformation prevention part having varying thicknesses. |
申请公布号 |
US2014150721(A1) |
申请公布日期 |
2014.06.05 |
申请号 |
US201313966242 |
申请日期 |
2013.08.13 |
申请人 |
Samsung Display Co., LTD. |
发明人 |
Oh Yoon-Chan;Lee Choon-Ho |
分类号 |
B05C21/00 |
主分类号 |
B05C21/00 |
代理机构 |
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代理人 |
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主权项 |
1. A mask frame assembly for thin film deposition, the mask frame assembly comprising:
a mask frame having an opening; and a mask configured to be coupled to the mask frame and comprising:
a first surface for facing a deposition substrate;a second surface opposite the first surface; anda deformation prevention part having varying thicknesses.
|
地址 |
Yongin-City KR |