发明名称 MASK FRAME ASSEMBLY FOR THIN FILM DEPOSITION
摘要 A mask frame assembly for thin film deposition includes a mask frame having an opening, and a mask configured to be coupled to the mask frame and including a first surface for facing a deposition substrate, a second surface opposite the first surface, and a deformation prevention part having varying thicknesses.
申请公布号 US2014150721(A1) 申请公布日期 2014.06.05
申请号 US201313966242 申请日期 2013.08.13
申请人 Samsung Display Co., LTD. 发明人 Oh Yoon-Chan;Lee Choon-Ho
分类号 B05C21/00 主分类号 B05C21/00
代理机构 代理人
主权项 1. A mask frame assembly for thin film deposition, the mask frame assembly comprising: a mask frame having an opening; and a mask configured to be coupled to the mask frame and comprising: a first surface for facing a deposition substrate;a second surface opposite the first surface; anda deformation prevention part having varying thicknesses.
地址 Yongin-City KR
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