METHOD AND DEVICE FOR DETECTING MICRODEFECTS

摘要

The present invention provides a method for detecting microdefects, comprising the steps of: irradiating a pump laser beam of a constant frequency upon a sample; changing periodic reflection intensity by enabling the temperature of defect surface to change due to a photothermal effect of a defect in an area upon which the pump laser beam is irradiated; and measuring a change of the reflection intensity by irradiating a probe beam upon the sample.