发明名称 |
ENHANCED PREVENTATIVE MAINTENANCE UTILIZING DIRECT PART MARKING |
摘要 |
<p>Systems and methods are discussed for use in preventative maintenance and repair systems for semiconductor fabrication equipment. Each semiconductor fabrication system and its replacement components are marked with a unique identification so they may be individually tracked and managed. Data is associated with each fabrication system and component. A component management terminal accesses the data to facilitate preventative maintenance and repair of the semiconductor fabrication equipment.</p> |
申请公布号 |
WO2014085122(A1) |
申请公布日期 |
2014.06.05 |
申请号 |
WO2013US70548 |
申请日期 |
2013.11.18 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
CHANG, DC;SCHAUER, STEVEN ROBERT |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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