发明名称 A METHOD, SYSTEM, AND PROGRAM STORAGE DEVICE FOR MODELING CONTACT BAR RESISTANCE
摘要 <p>Disclosed are embodiments for modeling the total resistance (Rtot) of a contact bar. In the embodiments, sections (501, 502) of the contact bar (221, 222) are demarcated depending upon the location of an additional interconnect structure (223), which is on the contact bar, and relative to a diffusion region (250), which is traversed and contacted by the contact bar. For each of the sections, section-specific current density boundary conditions are established, section-specific sheet current density expressions are developed, which assume that current flow is continuous in the normal direction relative to each boundary between any two adjacent sections and which satisfy both the section-specific current density boundary conditions and a stable current flow continuity equation, and a section-specific resistance expression is developed using the section-specific sheet current density expressions. Finally, the total resistance expression for the contact bar is developed by adding the section-specific resistance expressions for all of the sections.</p>
申请公布号 WO2014084943(A1) 申请公布日期 2014.06.05
申请号 WO2013US57231 申请日期 2013.08.29
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 LU, NING
分类号 G06F17/50 主分类号 G06F17/50
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