| 摘要 |
PROBLEM TO BE SOLVED: To secure straightness and parallelism of a linear motion guide by suppressing increase in size of a device.SOLUTION: Linear motion mechanisms which are arranged on both end sides of a driven body include: frames 11 fixed to a device; bases 12 fixed to the driven body; linear motors 13 in which movers 13a on the base side and stators 13b on the frame side face each other in a horizontal direction; linear motion guides 14 consisting of slide rails 14a which are attached to upward horizontal surfaces 11b of the frames above the linear motors and extend in a direction in which the driven body is moved and sliders 14b which are attached to downward horizontal surfaces 12Ba of the bases and move along the slide rails; auxiliary guides 15 consisting of guide rails 15a which are attached to vertical surfaces of the frames below the linear motors and extend in the same direction as the slide rails 14a and rollers 15b which are attached to vertical surfaces of the bases and roll along the guide rails by contacting the guide rails in the direction in which the movers and the stators of the linear motors face each other; and movable sections which allow deviation of the bases in the vertical direction while maintaining fitting in the linear motion guides and engagement in the auxiliary guides. |
