Measurement Microscope Device, Image Generating Method, Measurement Microscope Device Operation Program, And Computer-Readable Recording Medium

摘要

An image with a wide visual field can be captured without causing deterioration in measurement accuracy. There are provided: a stage on which an object is placed; a display unit for displaying a height image or an observation image; a measurement unit for performing measurement on the height image; an image connecting unit configured to, by moving the stage and capturing a different region, acquire a plurality of height images, and connect the obtained plurality of height images and observation images to generate a connected image; a measurement error region display unit configured to superimpose and display a measurement error region, on an image of the object; and a measurement-image imaging condition setting unit for adjusting an imaging condition for a striped image required for generation of the height image to reduce the measurement error region.

主权项

1. A measurement microscope device comprising:
a first measurement light projecting unit configured to irradiate an object with first measurement light from a first direction, the unit being a measurement light projecting unit for projecting measurement light as predetermined pattern structured illumination to the object from an oblique direction; an observation illumination light source for generating illumination light when capturing an observation image; an imaging unit for acquiring measurement light projected by the first measurement light projecting unit and reflected by the object to capture a plurality of striped images, and using the observation illumination light source to capture an observation image having texture information; a height image acquiring unit for acquiring a height image having height information based on the plurality of striped images; a stage on which the object is placed; a display unit for displaying the height image or the observation image; a measurement unit for performing measurement on the height image displayed on the display unit; an image connecting unit configured to, by moving the stage and capturing a different region including a connection margin by the imaging unit, acquire a plurality of height images for connection and observation images for connection, and connect the obtained plurality of height images for connection and observation images for connection to generate a connected image; a measurement error region display unit configured to superimpose and display a measurement error region, where a result of measurement of the height is error, on an image of the object corresponding to each region to be connected by the image connecting unit; and a measurement-image imaging condition setting unit for adjusting an imaging condition for a striped image required for generation of the height image to reduce the measurement error region in a state where the measurement error region is displayed.