| 摘要 |
Detection weights (32, 33), which are arranged in the x-axis direction in an external driving weight (31), are disposed in a gyro sensor, and the detection weights (32, 33) are coupled by a coupling spring (44). Thus, an in-phase mode resonance frequency (fin) and an anti-phase mode resonance frequency (fanti) can be separated by coupling both detection weights (32, 33) by the coupling spring (44). As a result, a gyro sensor can be achieved wherein output error when subjected to an impact can be suppressed and angular velocity can be detected more accurately. |
