| 摘要 |
<p>This photodiode array is equipped with a plurality of photodiodes formed on a semiconductor substrate. Each of the photodiodes has: a first semiconductor region of a first conductive type provided on the semiconductor substrate; a second semiconductor region of the first conductive type having a higher impurity concentration than that of the first semiconductor region, and positioned on one surface of the semiconductor substrate in relation to the first semiconductor region; a third semiconductor region of a second conductive type constituting the first semiconductor region and a photodetection region, and provided on the one surface in relation to the first semiconductor region so as to surround the second semiconductor region and be separated from the second semiconductor region; and a through electrode electrically connected to the third semiconductor region, and positioned inside a through-hole for passing between the one surface and the other surface of the semiconductor substrate so as to pass through the first semiconductor region and the second semiconductor region.</p> |
