ADHESIVE METAL NITRIDE ON GLASS AND RELATED METHODS
摘要
<p>This disclosure provides systems, methods and apparatus for an adhesive metal nitride layer on glass. In one aspect, a glass substrate having a surface is provided. A via with a depth to width aspect ratio of 5 to 1 or greater extends at least partially through the glass substrate. An adhesive metal nitride layer is disposed on the surface of the glass substrate and on one or more interior surfaces of the via. The adhesive metal nitride layer includes at least one of titanium nitride and tantalum nitride.</p>
申请公布号
WO2014085310(A1)
申请公布日期
2014.06.05
申请号
WO2013US71639
申请日期
2013.11.25
申请人
QUALCOMM MEMS TECHNOLOGIES, INC.
发明人
PUSHPARAJ, VICTOR LOUIS AROCKIARAJ;SHENOY, RAVINDRA V.;LASITER, JON BRADLEY;LAI, KWAN-YU;KIDWELL, DONALD WILLIAM;LONDERGAN, ANA RANGELOVA