MULTI-AXIS ROBOT APPARATUS WITH UNEQUAL LENGTH FOREARMS, ELECTRONIC DEVICE MANUFACTURING SYSTEMS, AND METHODS FOR TRANSPORTING SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING

摘要

Embodiments include multi-arm robots for substrate transport systems that include a boom, first and second forearms rotationally coupled to the boom, the second forearm being shorter than the first forearm, a first wrist member rotationally coupled to the first forearm, and a second wrist member rotationally coupled to the second forearm. Each of the boom, first and second forearms, and the first and second wrist members are configured to be independently rotated to carry out substrate motion profiles. Electronic device processing systems and methods of transporting substrates are described, as are numerous other aspects.

主权项

1. A multi-axis robot, comprising:
a boom adapted to rotate about a first rotational axis; a first forearm rotationally coupled to the boom at an outboard end of the boom and the first forearm is configured to be independently rotated about a second rotational axis; a second forearm rotationally coupled to the boom at the outboard end of the boom and configured to be independently rotated about the second rotational axis, the second forearm being shorter than the first forearm; a first wrist member rotationally coupled to the first forearm at a first outer location of the first forearm and configured to be independently rotated relative to the first forearm about a third axis; and a second wrist member rotationally coupled to the second forearm at the second outer location and configured to be independently rotated relative to the second forearm about a fourth axis.