| 发明名称 |
HEATER ASSEMBLY FOR DISK PROCESSING SYSTEM |
| 摘要 |
A heater assembly for a disk processing system including a heater element configured to heat a substrate carried by a holder, and a heater cover having an aperture to expose the heater element to the substrate. The cover may be metal to thermally couple the heater to a cooling plate. The cover may have an outer surface having a thermal barrier surrounding the aperture to thermally insulate the holder. |
| 申请公布号 |
US2014151360(A1) |
申请公布日期 |
2014.06.05 |
| 申请号 |
US201213691736 |
申请日期 |
2012.11.30 |
| 申请人 |
WD MEDIA, INC. |
发明人 |
GREGORY LANDDELL;ZAINUDDIN ZATUL 'ITRI B.;LIM CHI CHOY |
| 分类号 |
H05B3/10 |
主分类号 |
H05B3/10 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A heater assembly for a disk processing system, comprising:
a heater element configured to heat a substrate carried by a holder; and a heater cover having an aperture to expose the heater element to the substrate, wherein the heater cover further comprises an outer surface having a thermal barrier surrounding the aperture to thermally insulate the holder.
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| 地址 |
US |
