| 摘要 |
<p>Disclosed is a method for phase synchronization of externally inputted signals of a radiofrequency power supply, comprising: making the radio frequency power supply to be provided with multiple radiofrequency signal output ends and one radiofrequency signal input end; making the multiple radiofrequency signal output ends and the one radiofrequency signal input end to be all connected with a radiofrequency signal generator, where connecting coaxial cables are of a same length; the radiofrequency signal input end connects to one of the radiofrequency signal output ends of self by using a coaxial cable, while connecting coaxial cables between multiple radiofrequency power supplies of a same machine are of a same length. For a path that is passed through by a radiofrequency signal used by the radiofrequency power supplies, the present invention provides the coaxial cables of a same length for transmission of the radiofrequency signal, therefore, signal phase differences between the radiofrequency power supplies of a same machine are eliminated, phase synchronization is maintained, crosstalk is prevented, and process stability is increased. The present invention requires only that the coaxial cables connecting to the external are of a same length and material to implement phase synchronization, thus is not only of reduced costs, but also convenient and expeditious.</p> |
