| 摘要 |
The present invention relates to an interlock control system and a control method thereof for preventing operational errors of a load side and/or a chamber due to the malfunction of a control computer by generating an interlock signal including an off signal and transmitting the interlock signal to the load side through an interlock control device installed between the control computer and the load side when a control signal transmitted from the control signal to the load side maintains constantly for more than a predetermined time. To this end, the interlock control system according to an embodiment of the present invention includes a control terminal, an interlock control device, a load side, and a semiconductor equipment, which are interconnected through a field bus The interlock control system further includes: a control terminal for generating a control signal and transmitting the control signal to control a predetermined among one or more devices included in the load side; an interlock control device for receiving a control transmitted from the control terminal to transmit the control signal to the load side, and counting an interlock time when the transmitted control signal is a signal in a transition state from an off state to an on state, and generating an interlock signal to transmit the interlock signal to the load side when the counted interlock time exceeds a predetermined time; a load side for controlling an operational state of a specific device corresponding to the control signal or the interlock signal among the one or more devices, based on the control signal or the interlock signal transmitted from the interlock control device; and a semiconductor equipment for controlling motion based on an output according to the operational state of the load side. |
