METHOD FOR PRODUCING THIN FILM OF CORE-SHELL NANOPARTICLES UNIFORMLY ARRANGED ON SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a thin film of core-shell nanoparticles uniformly arranged on a substrate.SOLUTION: A method for producing a thin film of core-shell nanoparticles uniformly arranged on a substrate uses an atomic layer deposition (ALD) to form a shell. Nanoparticle cores are placed in a solution containing a polymer having an end group for attachment to the core. The solution is applied to a substrate and dried, so that the nanoparticle cores are uniformly arranged by the attached polymer chains. The ALD is used to grow a shell material on the core using two precursors for the shell material non-reactive with the polymer. The polymer chains are formed between the cores and the surface of the substrate, so that the ALD forms the shell material completely surrounding each of the cores. The uniformly arranged core-shell nanoparticles can be used as an etching mask to etch the substrate.