主权项 |
1. An optical apparatus comprising:
a laser light source; an objective configured to irradiate a sample with laser light from the laser light source; a phase-modulation spatial light modulator located at a position optically conjugate to a pupil position of the objective and configured to modulate a phase of the laser light; a scan unit configured to scan the sample with the laser light so as to generate an image of the sample; a detector configured to detect observation light from the sample; an image generating unit configured to generate an image of the sample according to a signal from the detector and control information of the scan unit; and a controlling unit configured to set, for the phase-modulation spatial light modulator, a modulation amount of modulation of the phase of the laser light in accordance with a pattern to be formed on the sample using the laser light, wherein according to the pattern to be formed on the sample and a pattern of irradiation with the laser light obtained from the image generated by the image generating unit, the controlling unit corrects the modulation amount that is set for the phase-modulation spatial light modulator.
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