发明名称 IMPROVED SEED LAYER FOR MULTILAYER MAGNETIC MATERIALS
摘要 A magnetic element is disclosed wherein a composite seed layer such as TaN/Mg enhances perpendicular magnetic anisotropy (PMA) in an overlying magnetic layer that may be a reference layer, free layer, or dipole layer. The first seed layer is selected from one or more of Ta, Zr, Nb, TaN, ZrN, NbN, and Ru. The second seed layer is selected from one or more of Mg, Sr, Ti, Al, V, Hf, B, and Si. A growth promoting layer made of NiCr or an alloy thereof may be inserted between the seed layer and magnetic layer. The magnetic element has thermal stability to at least 400°C.
申请公布号 WO2014059083(A3) 申请公布日期 2014.06.05
申请号 WO2013US64243 申请日期 2013.10.10
申请人 HEADWAY TECHNOLOGIES, INC.;JAN, GUENOLE;TONG, RU-YING 发明人 JAN, GUENOLE;TONG, RU-YING
分类号 H01L43/08;G11C11/16;H01F10/32;H01L43/12 主分类号 H01L43/08
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