| 摘要 |
A molecular pump (1A) includes a pump body (2) provided with a turbo molecular pump portion (2a), a control unit (4) provided with a control portion and a power supply portion, and a cooling unit (3) for cooling the pump body (2) and the control unit (4). A first temperature detecting portion (90) is provided in a first position, which is a position inside the control unit (4) and has a low temperature. A second temperature detecting portion (80) also serving as a humidity detecting portion is provided in a second position, which is a position inside the control unit (4) and has a high temperature. The control portion controls the operation of the cooling unit (3) in accordance with a relative humidity in the first position, calculated based on temperature information detected by the first temperature detecting portion (90) and based on temperature information and humidity information detected by the second temperature detecting portion (80) also serving as a humidity detecting portion. |
