发明名称 |
Thin films having large temperature coefficient of resistance and methods of fabricating same |
摘要 |
An apparatus comprises a head transducer and a resistive temperature sensor provided on the head transducer. The resistive temperature sensor comprises a first layer comprising a conductive material and having a temperature coefficient of resistance (TCR) and a second layer comprising at least one of a specular layer and a seed layer. A method is disclosed to fabricate such sensor with a laminated thin film structure to achieve a large TCR. The thicknesses of various layers in the laminated thin film are in the range of few to a few tens of nanometers. The combinations of the deliberately optimized multilayer thin film structures and the fabrication of such films at the elevated temperatures are disclosed to obtain the large TCR. |
申请公布号 |
EP2738777(A2) |
申请公布日期 |
2014.06.04 |
申请号 |
EP20130194710 |
申请日期 |
2013.11.27 |
申请人 |
SEAGATE TECHNOLOGY LLC |
发明人 |
TIAN, WEI;MACKEN, DECLAN;YIN, HUAQING;INTURI, VENKATESWARA RAO;SINGLETON, ERIC WALTER |
分类号 |
H01C7/02;G01K7/16;G11B5/60;H01C7/00 |
主分类号 |
H01C7/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|