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发明名称
GRIPPER, LITHOGRAPHIC APPARATUS, METHOD OF THERMALLY CONDITIONING A SUBSTRATE, AND DEVICE MANUFACTURING METHOD.
摘要
申请公布号
NL2011652(A)
申请公布日期
2014.06.04
申请号
NL20132011652
申请日期
2013.10.21
申请人
ASML NETHERLANDS B.V.
发明人
CUIJPERS MARTINUS;VISSER RAIMOND
分类号
G03F7/20;H01L21/687
主分类号
G03F7/20
代理机构
代理人
主权项
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