发明名称 |
METHOD AND APPARATUS FOR PROTECTING PASSIVE COMPONENTS CONNECTED TO A RADIO-FREQUENCY GENERATOR |
摘要 |
In one aspect, a method includes protecting passive components connected to a high-frequency generator. In another aspect, a system includes a high-frequency generator having an HF source generating a high-frequency power signal at a fundamental frequency, and having a first control circuit which is fed with a signal related to an HF power transmitted by a high-frequency cable between the high-frequency generator and a load. |
申请公布号 |
EP2737516(A2) |
申请公布日期 |
2014.06.04 |
申请号 |
EP20120769007 |
申请日期 |
2012.07.25 |
申请人 |
TRUMPF HÜTTINGER GMBH + CO. KG |
发明人 |
FRITSCH, CHRISTIAN;MANN, EKKEHARD;SEIFERT, GERHARD |
分类号 |
H01J37/32 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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