发明名称 HIGH VOLTAGE MOSFET AND METHOD OF MAKING THE SAME
摘要 <p>At least one N-well implant having a different doping level is formed in a silicon substrate by first etching the substrate with an alignment target for aligning future process masks thereto. This alignment target is outside of any active device area. By using at least one N-well implant having a different doping level in combination with the substrate, a graded junction in the drift area of a metal oxide semiconductor (MOS) field effect transistor (FET) can be created and a pseudo Ldd structure may be realized thereby.</p>
申请公布号 EP2737539(A2) 申请公布日期 2014.06.04
申请号 EP20120750895 申请日期 2012.07.23
申请人 MICROCHIP TECHNOLOGY INCORPORATED 发明人 DIX, GREGORY;MCKEEN, LEIGHTON, E.;LIVINGSTON, IAN;MELCHER, ROGER;BRAITHWAITE, ROHAN
分类号 H01L29/78;H01L21/266;H01L21/336;H01L23/544;H01L29/08;H01L29/10;H01L29/36;H01L29/423 主分类号 H01L29/78
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