Gas sensor with gas-sensitive layer comprising metal-organic frameworks

摘要

The device comprises a detection material, whose electronic work function is changed during an interaction with the volatile organic compound or an oxidizing gas (5). A unit is provided for detecting changes of the electronic work function of the detection material. The detection material is a copper benzene tricarboxylate metal-organic-framework. The unit has a field effect transistor structure for detecting changes of the electronic work function. The detection material is provided in the area of the gate of the field effect transistor structure. An independent claim is included for a method for manufacturing a device for detecting a volatile organic compound or an oxidizing gas, which involves applying a detection material on a carrier, particularly a silicon substrate as a layer with a non-gas-sensitive organic binder, particularly ethyl cellulose.