Coaxial waveguide microstructures having an active device and methods of formation thereof

摘要

Provided are coaxial waveguide microstructures. The microstructures include a substrate and a coaxial waveguide disposed above the substrate. The coaxial waveguide includes: a center conductor; an outer conductor including one or more walls, spaced apart from and disposed around the center conductor; one or more dielectric support members for supporting the center conductor in contact with the center conductor and enclosed within the outer conductor; and a core volume between the center conductor and the outer conductor, wherein the core volume is under vacuum or in a gas state. Also provided are methods of forming coaxial waveguide microstructures by a sequential build process and hermetic packages which include a coaxial waveguide microstructure.

主权项

1. A coaxial waveguide microstructure, wherein the coaxial waveguide has a generally rectangular coaxial structure, comprising:
a substrate; and a coaxial waveguide disposed above the substrate, comprising:
a center conductor;an outer conductor comprising one or more walls, spaced apart from and disposed around the center conductor, wherein the center conductor and outer conductor comprise copper or a copper alloy;a first plurality of dielectric support members for supporting the center conductor in contact with the center conductor and enclosed within the outer conductor;a core volume between the center conductor and the outer conductor, wherein the core volume is under vacuum or in a gas state; andan active device bonded to the waveguide.