Method of manufacturing semiconductor device including first conductive pattern and second conductive pattern having top surface which decreases in height

摘要

A semiconductor device has a semiconductor substrate, a plurality of first conductive patterns, a second conductive pattern having a top surface of which stepwisely or gradually decreases in height in a direction from a side facing the first conductive pattern toward an opposite side, a first insulation film formed over the plurality of first conductive patterns and the second conductive pattern, and a third conductive pattern formed over the first insulation film.

主权项

1. A method of manufacturing a semiconductor device comprising:
forming a first conductive film over a semiconductor substrate; etching the first conductive film thereby forming a plurality of first conductive patterns provided in a first direction and a second conductive pattern provided in parallel to the plurality of first conductive patterns; covering the whole of each of the plurality of first conductive patterns and a first part of the second conductive pattern closer to the first conductive pattern with a first mask pattern, while exposing a second part of the second conductive pattern further from the first conductive pattern; etching the second conductive pattern in a thickness direction with the first mask pattern as a mask so as not to etch the plurality of first conductive patterns and the first part of the second conductive pattern; forming a first insulation film over the plurality of first conductive patterns and the second conductive pattern; and forming a third conductive film over the first insulation film.