| 发明名称 |
Laser ion source |
| 摘要 |
According to one embodiment, a laser ion source is configured to generate ions by application of a laser beam, the laser ion source including a case to be evacuated, an irradiation box disposed in the case and including a target which generates ions by irradiation of laser light, an ion beam extraction mechanism which electrostatically extracts ions from the irradiation box and guides the ions outside the case as an ion beam, a valve provided to an ion beam outlet of the case, the valve being opened at ion beam emission and being closed at other times, and a shutter provided between the valve and the irradiation box, the shutter being intermittently opened at ion beam emission and being closed at other times. |
| 申请公布号 |
US8742362(B2) |
申请公布日期 |
2014.06.03 |
| 申请号 |
US201313771584 |
申请日期 |
2013.02.20 |
| 申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
Hayashi Kazuo;Kakutani Akiko;Osanai Akihiro;Sato Kiyokazu;Kurusu Tsutomu;Yoshiyuki Takeshi |
| 分类号 |
H01J27/24;H01J27/02;H01J49/10 |
主分类号 |
H01J27/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A laser ion source, comprising:
a case to be evacuated; an irradiation box disposed in the case and comprising a target which generates ions by irradiation of laser light; an ion beam extraction mechanism which electrostatically extracts ions from the irradiation box and guides the ions outside the case as an ion beam; a valve provided to an ion beam outlet of the case, the valve being opened at ion beam emission and being closed at other times; and a shutter provided between the valve and the irradiation box, the shutter being intermittently opened at ion beam emission and being closed at other times.
|
| 地址 |
Minato-ku JP |
