Encoder and interferometer that generate M-phase signals by multiplying N-phase signals by M coefficient sets, where N is not less than 6 and M is not smaller than 2

摘要

The laminated diffractive optical element includes plural diffraction gratings (21, 22 and 23) laminated with each other, the respective diffraction gratings being formed of a same light-transmissive material. In the element, reflective films are formed on grating surfaces (11 and 12) of the respective diffraction gratings, each of the reflective films being disposed between the diffraction gratings. Each of the reflective films reflects light in a specific wavelength range and transmits light in a wavelength range different from the specific wavelength range, the specific wavelength ranges of the respective reflective films being different from each other. The grating surfaces of the respective diffraction gratings are formed in shapes different from each other according to the specific wavelength ranges corresponding to the respective reflective films.

主权项

1. An optical encoder comprising:
a grating scale configured to be movable; a light-receiving device configured to receive light via the grating scale irradiated with light, to generate N-phase signals that have respective phases different from each other, where N is an integer not smaller than 6; and an amplifier configured to:
multiply the generated N-phase signals by M coefficient sets that are different from each other, where M is an integer not smaller than 2; andobtain a sum of the multiplied values with respect to each of the M coefficient sets to generate M-phase signals,wherein the M coefficient sets are represented by following expressions:G⁢⁢1⁢(k)={1+sin⁡(1/N×2⁢π+π×(k-1)/M)]/2,⁢G⁢⁢2⁢(k)={1+sin⁡(2/N×2⁢π+π×(k-1)/M)}/2,⁢G⁢⁢3⁢(k)={1+sin⁡(3/N×2⁢π+π×(k-1)/M)]/2,⁢…G⁢⁢N⁡(k)={1+sin⁡(N/N×2⁢π+π×(k-1)/M)}/2,⁢where⁢⁢k=1,2,…⁢,M.