发明名称 INDEPENDENT AND SYMMETRIC DOUBLE GATED ELECTRON-HOLE BILAYER TUNNEL FIELD EFFECT TRANSISTOR AND ITS FABRICATION METHOD
摘要 <p>The present invention relates to an electron-hole bilayer tunnel field effect transistor using a symmetrical double gate structure and a manufacturing method of the transistor and, more specifically, to an electron-hole bilayer tunnel field effect transistor using a symmetrical double gate structure and a manufacturing method of the transistor, capable of bringing the improvement of a slope and an increase in an operation current under a threshold voltage by using a double gate p-i-n structure and inter-band tunneling; and being formed in practice by suggesting the symmetrical gate structure.</p>
申请公布号 KR101402697(B1) 申请公布日期 2014.06.03
申请号 KR20120143844 申请日期 2012.12.11
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 LEE, SEOK HEE;KIM, TAE KYUN;MOON, JUNG MIN;JEONG, WOO JIN
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
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