发明名称 |
INDEPENDENT AND SYMMETRIC DOUBLE GATED ELECTRON-HOLE BILAYER TUNNEL FIELD EFFECT TRANSISTOR AND ITS FABRICATION METHOD |
摘要 |
<p>The present invention relates to an electron-hole bilayer tunnel field effect transistor using a symmetrical double gate structure and a manufacturing method of the transistor and, more specifically, to an electron-hole bilayer tunnel field effect transistor using a symmetrical double gate structure and a manufacturing method of the transistor, capable of bringing the improvement of a slope and an increase in an operation current under a threshold voltage by using a double gate p-i-n structure and inter-band tunneling; and being formed in practice by suggesting the symmetrical gate structure.</p> |
申请公布号 |
KR101402697(B1) |
申请公布日期 |
2014.06.03 |
申请号 |
KR20120143844 |
申请日期 |
2012.12.11 |
申请人 |
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
LEE, SEOK HEE;KIM, TAE KYUN;MOON, JUNG MIN;JEONG, WOO JIN |
分类号 |
H01L21/336;H01L29/78 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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