| 摘要 |
Disclosed is a linear ion beam generator capable of controlling the direction of an ion beam. The linear ion beam generator includes a first cathode; a second anode which surrounds the first cathode and forms an ion beam extraction part between the first cathode; and an anode which is separated and partly overlapped with at least one part of the first and the second cathode on the lower part of the ion beam extraction part. A surface which faces the first and the second cathode forms an asymmetric structure and comprises the extraction path of the ion beam which is slantly extracted from the center of the first cathode to the inner side or the outer side. [Reference numerals] (AA) Electron |
