发明名称 Method of manufacturing thin film transistor
摘要 A method of manufacturing a thin-film transistor (TFT) includes forming an amorphous silicon layer on a substrate, crystallizing the amorphous silicon layer into a polycrystalline silicon layer using a laser beam, and selectively etching a protrusion formed at a grain boundary in the polycrystalline silicon layer using a hydroxide etchant.
申请公布号 KR101402261(B1) 申请公布日期 2014.06.03
申请号 KR20070094915 申请日期 2007.09.18
申请人 发明人
分类号 H01L29/786 主分类号 H01L29/786
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