发明名称 UNIT FOR SUPPLYING SILICON AND APPARATUS FOR GROWING SILICON SINGLE CRYSTAL INGOT
摘要 PURPOSE: A silicon supplying unit and a silicon single crystal ingot growing apparatus are provided to prevent a collision between a fixing unit and a connecting unit by connecting the fixing unit to the connecting unit by a wire. CONSTITUTION: A connecting unit (250) is connected to a fixing unit (260) by a wire (265). The fixing unit includes a body and a first protrusion part. A tube (110) is connected to the connecting unit by a seed cable (140). The tube receives polysilicon. A support (130) is arranged on the lower side of the tube. A supporter (120) is arranged on the upper side of the tube.
申请公布号 KR101402839(B1) 申请公布日期 2014.06.03
申请号 KR20120000418 申请日期 2012.01.03
申请人 发明人
分类号 C30B15/00;C30B29/06;H01L21/02 主分类号 C30B15/00
代理机构 代理人
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