Ultraviolet laser

摘要

A laser device is disclosed that provides at least an ultraviolet laser beam and preferably both an ultraviolet laser beam and a visible laser beam. The laser device includes a semiconductor laser device (e.g. a laser diode) to generate visible laser light which is coupled into a frequency doubling crystal taking the form of a single crystal thin film frequency-doubling waveguide structure. The single crystal thin film frequency-doubling waveguide converts a portion of the visible light emitted by the laser diode into ultraviolet light. Both visible and ultraviolet laser light is emitted from the waveguide. As an example, the single crystal thin film frequency-doubling frequency doubling waveguide includes a frequency doubling crystal region composed of β-BaB2O4 (β-BBO), a cladding region composed of materials that are transparent or nearly transparent at the wavelength of the ultraviolet laser light beam and a supporting substrate composed of any material.

主权项

1. A laser light source for providing ultraviolet light, comprising:
a semiconductor laser device configured to emit visible light having a wavelength between 400 nm and 560 nm; and a frequency doubling waveguide including a single crystal thin-film, the waveguide optically coupled to the semiconductor laser device to receive the visible light emitted therefrom, the frequency doubling waveguide configured to convert at least a portion of the received light into ultraviolet light having a wavelength between 200 nm and 280 nm, wherein the waveguide comprises: a frequency doubling region including a single crystal non-linear optical material; a first cladding layer arranged on the single-crystal non-linear material and comprising material substantially transparent to light having wavelengths of visible and ultraviolet laser light beams; a supporting substrate; and an adhesive layer attaching the first cladding layer to the supporting substrate.